000 00318nam a2200121Ia 4500
008 160122s9999 xx 000 0 und d
041 _aEnglish
100 _aStephen A Campbell
245 4 _aThe Science & Engineering of Microelectronic Fabri
260 _bDelhi:Oxford Uni
_c1996
300 _a536p.
650 _aElectronic
999 _c961
_d961